Compression ratio: 7*e8 (N2), 1.5*e4 (He), 1*e3 (H2)
Ultimate pressure without purge: 8 * e-10 mbar
Ultimate pressure with purge: 1* e-7 mbar
Rotational speed: 27000 rpm
Start-up time: 3 min
| Turbomolecular Pump | |
| | |
| Manufacturer | ALCATEL |
| Model | ATP400 |
| Quantity | 2 EA |
| Characteristics |
Pumping speed: 400 l/s (N2), 300 l/s (He), 250 l/s (H2) Compression ratio: 7*e8 (N2), 1.5*e4 (He), 1*e3 (H2) Ultimate pressure without purge: 8 * e-10 mbar Ultimate pressure with purge: 1* e-7 mbar Rotational speed: 27000 rpm Start-up time: 3 min |