Ultimate pressure with rotary vane pump: < 3.75*e-10 torr
Ultimate pressure with diaphragm pump: < 7.5*e-9 torr
Gas throughput at full rotational speed for N2: 3 torr l/s
Gas throughput at 0.1 mbar HV for N2: 9 torr l/s
Fore Vacuum max. for N2: 9.75 torr
Sealing gas connection: yes